Author(s):Junige, M. | Oddoy, T. | Yakimova, R. | Darakchieva, V. | Wenger, C. | Lupina, G. | Kitzmann, J. | Albert, M. | Bartha, J.W.
Publication year: 2015
Journal / Book title: Proceedings of SPIE – The International Society for Optical Engineering

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Source:: <a href=http://syndic8.scopus.com/action/redirectFile?&zone=main&currentActivity=feed&usageType=outward&url=http%3A%2F%2Fwww.scopus.com%2Finward%2Frecord.url%3Feid%3D2-s2.0-84938844724%26rel%3DR4.0.0%26partnerID%3D35%26md5%3D522e153917a216ff72dd0c4f884eabb6 target="_blank" title="Atomic layer deposition of Al2O3 on NF3-pre-treated graphene” >Atomic layer deposition of Al2O3 on NF3-pre-treated graphene