Atomic layer deposition of Al2O3 on NF3-pre-treated graphene

Author(s):Junige, M. | Oddoy, T. | Yakimova, R. | Darakchieva, V. | Wenger, C. | Lupina, G. | Kitzmann, J. | Albert, M. | Bartha, J.W.
Publication year: 2015
Journal / Book title: Proceedings of SPIE – The International Society for Optical Engineering

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